JPS6073409A - 外観検査方法およびその装置 - Google Patents

外観検査方法およびその装置

Info

Publication number
JPS6073409A
JPS6073409A JP18376483A JP18376483A JPS6073409A JP S6073409 A JPS6073409 A JP S6073409A JP 18376483 A JP18376483 A JP 18376483A JP 18376483 A JP18376483 A JP 18376483A JP S6073409 A JPS6073409 A JP S6073409A
Authority
JP
Japan
Prior art keywords
light
inspected
receiving system
light receiving
photodetection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18376483A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0242406B2 (en]
Inventor
Yasukazu Fujimoto
靖一 藤本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP18376483A priority Critical patent/JPS6073409A/ja
Publication of JPS6073409A publication Critical patent/JPS6073409A/ja
Publication of JPH0242406B2 publication Critical patent/JPH0242406B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP18376483A 1983-09-30 1983-09-30 外観検査方法およびその装置 Granted JPS6073409A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18376483A JPS6073409A (ja) 1983-09-30 1983-09-30 外観検査方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18376483A JPS6073409A (ja) 1983-09-30 1983-09-30 外観検査方法およびその装置

Publications (2)

Publication Number Publication Date
JPS6073409A true JPS6073409A (ja) 1985-04-25
JPH0242406B2 JPH0242406B2 (en]) 1990-09-21

Family

ID=16141558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18376483A Granted JPS6073409A (ja) 1983-09-30 1983-09-30 外観検査方法およびその装置

Country Status (1)

Country Link
JP (1) JPS6073409A (en])

Also Published As

Publication number Publication date
JPH0242406B2 (en]) 1990-09-21

Similar Documents

Publication Publication Date Title
US6798504B2 (en) Apparatus and method for inspecting surface of semiconductor wafer or the like
CN111638226B (zh) 检测方法、图像处理器以及检测系统
JP2002062267A (ja) 欠点検査装置
JPH06294749A (ja) 板ガラスの欠点検査方法
JPH11311510A (ja) 微小凹凸の検査方法および検査装置
JPH0787208B2 (ja) 面板欠陥検出光学装置
JPS63143830A (ja) ヘイズ欠陥検出方法
JPH01257250A (ja) ディスク表面検査装置における欠陥種別の判別方法
JPH0833354B2 (ja) 欠陥検査装置
JPS6073409A (ja) 外観検査方法およびその装置
JP2873450B2 (ja) 光による欠点検査装置
JPS6069539A (ja) 表面欠陥検査装置
JPH03115844A (ja) 表面欠点検出方法
JPH0228815B2 (en])
JPS62267650A (ja) 面板欠陥検出方法およびその検出器
JPH04148817A (ja) 表面検査装置
JPH0311403B2 (en])
JPH07119703B2 (ja) 表面欠陥検査装置
JPH0196537A (ja) ガラスディスク欠陥識別方法および欠陥検出光学装置
US5402228A (en) On-line dirt counter
JPS6344151A (ja) 外観検査装置
JPH0610658B2 (ja) 表面欠陥検出装置
JPH08220018A (ja) 表面疵検査方法及び装置
JPH0252241A (ja) 表面欠陥検査装置
JPH0326447Y2 (en])